| APA | Smart Define. (2013). epitaxial deposition thesaurus. Retrieved September 30, 2026, from https://smartdefine.org/epitaxial_deposition/thesaurus/synonyms |
| Chicago | Smart Define. 2013. "epitaxial deposition thesaurus" https://smartdefine.org/epitaxial_deposition/thesaurus/synonyms (accessed September 30, 2026). |
| Harvard | Smart Define 2013, epitaxial deposition thesaurus, Smart Define, viewed 30 September, 2026, <https://smartdefine.org/epitaxial_deposition/thesaurus/synonyms>. |
| MLA | Smart Define. "epitaxial deposition thesaurus" 19 May 2013. Web. 30 September 2026. <https://smartdefine.org/epitaxial_deposition/thesaurus/synonyms> |